Active Control of Pneumatic Isolation Table with Spool Type Servo Valve and Quick Response Laminar Flow Sensor
نویسندگان
چکیده
منابع مشابه
Precise Position Control of a Pneumatic Servo Table System Consideration Dynamic Characteristics of Pneumatic Servo Valves
The performance of the pneumatic servo systems improved greatly as the pneumatic servo valves became commercially available in the late 1980s. At present, one of the best pneumatic servo valves has a dynamic response of 100 Hz and a spool position accuracy of 2% to the full stroke. By using these pneumatic servo valves, the precise position control by the pneumatic servo system has entered a pr...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering, Contributed Papers
سال: 2006
ISSN: 1881-8722,1348-8724
DOI: 10.2493/jspe.72.772